Henry Edin Deville thiab Friedrich Wöhleh Wörices tau tshaj tawm tias yog cov pa ntoo ntawm cov pa roj cua thiab muaj cov pa hluav taws xob nrog cov pa uas muaj kev sib tw ntawm cov pa roj oxygen. Lawv tau tshaj tawm cov khoom lag luam lawv hu ua silicon nitride, tab sis lawv tsis tau paub txog nws cov tshuaj lom neeg. Xyoo 1879, Paul Schuetzer Blicon nrog ob sab ntaub uas tuaj yeem siv hluav taws xob sib xyaw, thiab qhia nws ua qhov sib xyaw nrog cov lus sib xyaw nrog kev sib xyaw ntawm Si3N4. Xyoo 1910, Ludwig Weiss thiab Theodor Enginehardt rhuab cua sov silicon hauv cov nitrogen kom tau SI3N4. Xyoo 1925, Sittederich thiab Sitterich thiab Sitter siv Carbothermal txo rau tshav kub silicontre thiab carbon} Degree hauv kev ua si silicon nitride.
Silicon nitride tsis tau ua tiag tiag thiab kawm rau xyoo dhau los kom txog thaum cov ntawv thov kev lag luam ntawm silicon nitride tawm. Txij xyoo 1948 txog 1952, Acheson lub tuam txhab pob zeb diamond nyob ze Niagara Ntog, New York, sau npe ntau ntau daim duab thiab siv cov silicon nitride. Xyoo 1958, silicon nitride tsim los ntawm cov neeg tsis muaj txiaj ntsig carbide tau siv los ua thermocouple leeg, foob pob hluav taws xob, thiab crucibles rau melting hlau. Kev tshawb fawb ntawm silicon nitride nyob rau hauv lub teb chaws pib hauv 1953 nrog lub hom phiaj ntawm kev ua kom muaj qhov kub-rau cov roj av. Qhov no coj mus rau kev txhim kho ntawm Bonded Silicon Nitride thiab kub nias Silicon Nitride. Xyoo 1971, qhov kev tiv thaiv kev tshawb fawb kev tshawb fawb qib siab hauv Asmeskas Chav Lis Haujlwm Tiv Thaiv tau kos npe rau FD thiab Westinghouse los tsim ob lub zog roj.
Txawm hais tias cov khoom ntawm silicon nitride tau paub ntev, silicon nitride (txog 2 × lus me me) uas muaj nyob hauv ntiaj teb no tsis pom txog thaum xyoo 1990 nyob hauv Meteorites. Hom silicon nitride ore pom nyob rau hauv qhov xwm yog muaj npe "nierite" nyob rau hauv almred ortlo carl nier, ib tug tho kev tshawb fawb. Txawm li cas los xij, muaj pov thawj tias hom silicon nitride ore tej zaum tau pom nyob rau hauv lub hnub ci ntsa iab hauv Azerbaijan, tus qub qub qub, ua ntej. Meteorites muaj silicon Nitride cov zaub mov tseem tau pom hauv Guizhou Xeev, Suav. Ntxiv rau cov uas twb muaj nyob hauv lub hnub ci ntsa iab hauv ntiaj teb, silicon nitride kuj tau faib hauv cov plua plav rau sab nraud.
